The wafer-specific electrostatic chuck introduced by Suction Miracle can withstand high-intensity plasma plasma impact, and can be applied to the process of etching fixation, deformation correction, polishing cooling, and cutting of silicon wafers in semiconductor production.The electrostatic chuck uses high electrical insulation to withstand long-term ion shock inside the wafer etching equipment.This suction cup uses a non-mechanical adsorption method to prevent surface coating aging and damage to the wafer surface..
Electrostatic induction is a phenomenon in which the charge in a conductor is redistributed in a conductor under the action of an external electric field. When the charged object and the uncharged conductor are close to each other,the charge in the conductor is redistributed due to the interaction between the charges, the heterogeneous charge is attracted to the vicinity of the charged body,and the same type of charge is repelled from the charged body by the repulsive conductor. One end. At the same time, the Johnson-Rahbek effect indicates that an electrical potential is applied between the metal surface and the surface of the semiconductor material, and the surface is attractive. The magnitude of the force is related to the material properties and the voltage control law. Static electricity in life always causes trouble for us. However, the phenomenon of static electricity also contains energy. After years of hard work, the inhalation miracle makes the electrostatic technology safe and controllable.